Featured Research - Published in: Applied Physics Letters

 

Direct patterning of 2DEGs without lithography with DALP®

This research demonstrates a lithography-free approach to patterning SrTiO₃-based two-dimensional electron gases (2DEGs) using ATLANT 3D’s Direct Atomic Layer Processing (DALP®). The method enables spatially defined functional structures without post-growth microfabrication, offering a scalable pathway for oxide electronics, quantum materials, and advanced device fabrication.

 

SrTiO3 mock up.1